Lecture Notes on Principles of Plasma Processing | 合法醫療器材資訊網
(a)AmonopolarESC;(b)abipolarESC.Whatisseenisactuallythecoolantpaths(fromAppliedMaterials).toaresistiveload.Thisisbecausea%wavelength ...
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problem...
(PDF) Modeling of Electrostatic Chuck and Simulation of ... | 合法醫療器材資訊網
Design space of electrostatic chuck in etching chamber | 合法醫療器材資訊網
ESC基础培训20100811 | 合法醫療器材資訊網
Generation mechanism of residual clamping force in a bipolar ... | 合法醫療器材資訊網
Lecture Notes on Principles of Plasma Processing | 合法醫療器材資訊網
Principles of Electrostatic Chucks | 合法醫療器材資訊網
US7218503B2 | 合法醫療器材資訊網
博碩士論文行動網 | 合法醫療器材資訊網
電漿製程環境中雙極性靜電吸盤的量測與開發 | 合法醫療器材資訊網
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