Design space of electrostatic chuck in etching chamber | 合法醫療器材資訊網
由YSun著作·2015·被引用10次—Accordingtothenumberofelectrodes,ESCscanbeclassifiedintothemonopolar,bipolarandmultipolartype.Justasitsnameimplies,themonopolartypehasonly ...
Abstract: One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma-based and vacuum-based semiconductor processing. The electrostatic chuck plays an important role in adsorbing and cooling/heating wafers, and has technical advantages on non-edge exclusion, high reliability, wafer planarity, particles reduction and so on. This article extracts key design elements from the existing knowledge and techniques of electrostatic chuck by the method proposed by Paul and Beitz, and establishes a design space systematically. The design space is composed of working objects, working principles and working structures. The working objects involve electrostatic chuck components and materials, classifications, and relevant properties; the working principles involve clamping force, residual force, and temperature control; the working structures describe how to compose an electrostatic chuck ...
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Design space of electrostatic chuck in etching chamber | 合法醫療器材資訊網
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