Generation mechanism of residual clamping force in a bipolar ... | 合法醫療器材資訊網

論文摘要雙極性靜電吸盤(Electrostatic Chuck,ESC)已經在一系列的電漿製程環境中被研發使用，它的優勢是在於它不需加入電漿即可以有吸附能力，所以在業界 ... Read More

由 S Kanno 著作 · 2003 · 被引用 27 次 — Since the monopolar-type. ESC only has one electrode, a plasma is necessary for gen- erating the electric circuit for clamping a wafer. The advan- tages of the ... Read More

由 Y Sun 著作 · 2015 · 被引用 10 次 — According to the number of electrodes,ESCs can be classified into the monopolar​,bipolar and multipolar type. Just as its name implies,the monopolar type has only​ ... Read More

PDF | Electrostatic chuck (ESC) is one of the key components in IC manufacturing process, which ... its name implies, the monopolar type has only one electrode,. Read More

2 shows an illustrative monopolar ESC 60 housed by the processing chamber 10 of FIG. 1 in accordance with one embodiment of the present invention. Read More

(a) A monopolar ESC; (b) a bipolar ESC. What is seen is actually the coolant paths (from Applied Materials). to a resistive load. This is because a % wavelength ... Read More

雙極性靜電吸盤(Electrostatic Chuck,ESC)已經在一系列的電漿製程環境中被研發使用，它的優勢是在於它不需加入電漿即可以有吸附能力，所以在業界逐漸廣泛 ... Read More

a monopolar electrode and a conducting substrate yields a grip ... Electrostatic Chucks gripping Small Die on a Mobile ESC Carrier Wafer. The region around ... Read More

静电引力即库仑力，大小受到距离及介质影响，也与电压相关。 ? Where are the charges? 第2 页共31 页 ESC 基础培训? Monopolar chuck: the chucking voltage ... Read More