博碩士論文行動網 | 合法醫療器材資訊網
論文摘要雙極性靜電吸盤(ElectrostaticChuck,ESC)已經在一系列的電漿製程環境中被研發使用，它的優勢是在於它不需加入電漿即可以有吸附能力，所以在業界 ...
[1] Shone, A.J.,“Gate oxide charging and its elimination for
metal antenna capacitor and transistor in VLSI CMOS double layer
metal technology,”VLSI Technology Symp, pp. 73 (1989)
[2] Stamper, A.K. and S.L. Pennington,“Passivation-layer
charge-induced failure mechanism in 0.5μm CMOS technology,”IEEE
VLSI Multilevel interconnection Conference (VMIC), pp. 420
(1992)
[3] Strong, A.W.,“Gate dielectric integrity and reliability in
0.5μm CMOS technology,” IEEE Int. Reliability Physics Symp.
(IRPS), pp. 18 (1993)
[4] Stamper, A.K., J.B. Lasky, and J.W. Adkisson,“Plasma- induced
gate-oxide charging issues for sub-0.5μm complementary
metal-oxide-semiconductor technologies,”J. Vac. Sci. Technol. A,
vol. 13, pp. 905 (1995)
[5] Cheung, K.P. and C.S. Pai,“Charging Damage from Plasma
Enhanced TEOS deposition,” IEEE Electron Dev., vol. 16, pp. 220
(1995)
[6] Cote, D.R.,“Low temperature chemical vapor deposition
processes and dielec- trics for microelectronic cir...
Monopolar vs bipolar ESC Monopolar ESC electrostatic chuck原理 Bipolar ESC chucking force J-R type ESC ESC wafer Plasma dechuck Unipolar ESC Monopolar vs bipolar ESC Monopolar ESC electrostatic chuck原理 Bipolar ESC chucking force J-R type ESC ESC wafer Plasma dechuck Unipolar ESC baba 康定股份有限公司 必翔輪椅 PH-181B 得生''行血萬應膏 哪裡 買 總 鋮儀器股份有限公司 "NIHON KOHDEN" PHYSIOLOGICAL RESPONSE RECORDER Mediplus 採血管
博碩士論文行動網 | 合法醫療器材資訊網
論文摘要雙極性靜電吸盤(Electrostatic Chuck,ESC)已經在一系列的電漿製程環境中被研發使用，它的優勢是在於它不需加入電漿即可以有吸附能力，所以在業界 ... Read More
Generation mechanism of residual clamping force in a bipolar ... | 合法醫療器材資訊網
由 S Kanno 著作 · 2003 · 被引用 27 次 — Since the monopolar-type. ESC only has one electrode, a plasma is necessary for gen- erating the electric circuit for clamping a wafer. The advan- tages of the ... Read More
Design space of electrostatic chuck in etching chamber | 合法醫療器材資訊網
由 Y Sun 著作 · 2015 · 被引用 10 次 — According to the number of electrodes,ESCs can be classified into the monopolar,bipolar and multipolar type. Just as its name implies,the monopolar type has only ... Read More
(PDF) Modeling of Electrostatic Chuck and Simulation of ... | 合法醫療器材資訊網
PDF | Electrostatic chuck (ESC) is one of the key components in IC manufacturing process, which ... its name implies, the monopolar type has only one electrode,. Read More
US7218503B2 | 合法醫療器材資訊網
2 shows an illustrative monopolar ESC 60 housed by the processing chamber 10 of FIG. 1 in accordance with one embodiment of the present invention. Read More
Lecture Notes on Principles of Plasma Processing | 合法醫療器材資訊網
(a) A monopolar ESC; (b) a bipolar ESC. What is seen is actually the coolant paths (from Applied Materials). to a resistive load. This is because a % wavelength ... Read More
電漿製程環境中雙極性靜電吸盤的量測與開發 | 合法醫療器材資訊網
雙極性靜電吸盤(Electrostatic Chuck,ESC)已經在一系列的電漿製程環境中被研發使用，它的優勢是在於它不需加入電漿即可以有吸附能力，所以在業界逐漸廣泛 ... Read More
Principles of Electrostatic Chucks | 合法醫療器材資訊網
a monopolar electrode and a conducting substrate yields a grip ... Electrostatic Chucks gripping Small Die on a Mobile ESC Carrier Wafer. The region around ... Read More
ESC基础培训20100811 | 合法醫療器材資訊網
静电引力即库仑力，大小受到距离及介质影响，也与电压相关。 ? Where are the charges? 第2 页共31 页 ESC 基础培训? Monopolar chuck: the chucking voltage ... Read More
相關資訊整理
【"愛爾富"婦產科電子燒灼機及其附件】許可證字號:衛署醫器輸字第016795號
器材品名:"愛爾富"婦產科電子燒灼機及其附件許可證字號:衛署醫器輸字第016795號註銷狀態:已註銷註銷日期:2012/11/09註銷理由...
【超短波治療器】許可證字號:衛署醫器輸字第001030號
器材品名:超短波治療器許可證字號:衛署醫器輸字第001030號註銷狀態:已註銷註銷日期:1990/02/26註銷理由:有效期限已屆有效日...
【電刺激器】許可證字號:衛署醫器輸字第007306號
器材品名:電刺激器許可證字號:衛署醫器輸字第007306號註銷狀態:已註銷註銷日期:2005/04/13註銷理由:未展延而逾期者有效日期:...
【電燒灼器】許可證字號:衛署醫器輸字第004380號
器材品名:電燒灼器許可證字號:衛署醫器輸字第004380號註銷狀態:已註銷註銷日期:1992/07/14註銷理由:有效期間已屆未能補件有...
【舒膚手術用電燒灼筆】許可證字號:衛署醫器輸字第025168號
器材品名:舒膚手術用電燒灼筆許可證字號:衛署醫器輸字第025168號註銷狀態:註銷日期:註銷理由:有效日期:2023/07/06發證日期:2...
【單極高頻電燒灼器】許可證字號:衛署醫器輸字第006776號
器材品名:單極高頻電燒灼器許可證字號:衛署醫器輸字第006776號註銷狀態:已註銷註銷日期:2007/07/20註銷理由:許可證已逾有效...